Tomasini, PPTomasiniMachkaoutsan, VladimirVladimirMachkaoutsanThomas, S. G.S. G.ThomasLoo, RogerRogerLooCaymax, MattyMattyCaymaxVerheyen, PeterPeterVerheyen2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16315Stability of silicon germanium stressorsMeeting abstract