High-density and low-leakage novel embedded 3D MIM capacitor on Si interposer

Roda Neve, CesarCesarRoda NeveDetalle, MikaelMikaelDetalleNolmans, PhilipPhilipNolmansLi, YunlongYunlongLiDe Vos, JoeriJoeriDe VosVan der Plas, GeertGeertVan der PlasBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27224High-density and low-leakage novel embedded 3D MIM capacitor on Si interposerProceedings paperhttp://ieeexplore.ieee.org/document/7970024/