PDMS selective bonding for the fabrication of biocompatible all polymer NC microvalves

Jahanshahi, AmirAmirJahanshahiSalvo, PietroPietroSalvoVanfleteren, JanJanVanfleteren2021-10-212021-10-2120131057-7157https://imec-publications.be/handle/20.500.12860/22538PDMS selective bonding for the fabrication of biocompatible all polymer NC microvalvesJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6549182