Detavernier, C.C.DetavernierDonaton, R.R.DonatonMaex, KarenKarenMaexVan Meirhaeghe, R.R.Van MeirhaegheCardon, F.F.Cardon2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3415The influence of Ti capping layers on CoSi2 formationOral presentation