Extraction of the oxide charge density at front and back interfaces of SOI in nMOSFETs devices

Martino, Joao AntonioJoao AntonioMartinoSimoen, EddyEddySimoenClaeys, C.C.Claeys2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5468Extraction of the oxide charge density at front and back interfaces of SOI in nMOSFETs devicesOral presentation