Unbiased Roughness Measurements from Low Signal-to-Noise Ratio SEM Images

Mack, Chris A.Chris A.MackSeveri, JorenJorenSeveriZidan, MohamedMohamedZidanDe Simone, DaniloDaniloDe SimoneLorusso, GianGianLorusso2022-12-012022-09-082022-12-012022978-1-5106-4981-10277-786XWOS:000844549800019https://imec-publications.be/handle/20.500.12860/40380Unbiased Roughness Measurements from Low Signal-to-Noise Ratio SEM ImagesProceedings paper10.1117/12.2614454978-1-5106-4982-8WOS:000844549800019