Takeuchi, ShotaroShotaroTakeuchiNguyen, DuyDuyNguyenLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16287Si1-xGex growth using Si3H8 by low temperature chemical vapor depositionMeeting abstract