Jousseaume, VincentVincentJousseaumeZenasni, AzizAzizZenasniGourhant, OlivierOlivierGourhantFavennec, LaurentLaurentFavennecBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20881Ultra-low-k by CVD: deposition and curingBook chapter