SLIM-cut thin silicon wafering with enhanced crack and stress control

Vaes, JanJanVaesMasolin, AlexAlexMasolinPesquera Rodriguez, AmaiaAmaiaPesquera RodriguezDross, FredericFredericDross2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18123SLIM-cut thin silicon wafering with enhanced crack and stress controlProceedings paper