Czarnecki, PiotrPiotrCzarneckiRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussanNolmans, PhilipPhilipNolmansEkkels, PhillipPhillipEkkelsMuller, PhilippePhilippeMullerTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtPuers, BobBobPuersMarchand, LaurentLaurentMarchandDe Wolf, IngridIngridDe Wolf2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13581New insights into charging in capacitive RF MEMS switchesProceedings paper