Dekkers, HaroldHaroldDekkersLima, Lucas Petersen BarboseLucas Petersen BarboseLimaVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22245Conductivity improvements of atomic layer deposited Ta3N5Proceedings papercontent/58/10/195.full.pdf+html?sid=9d938819-9116-4bea-a5c6-18731b030d8e