Maex, KarenKarenMaexBaklanov, MikhaïlMikhaïlBaklanovShamiryan, DenisDenisShamiryanIacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaYanovitskaya, Z.S.Z.S.Yanovitskaya2021-10-152021-10-152003-06https://imec-publications.be/handle/20.500.12860/7844Low dielectric constant materials for microelectronicsJournal article