Poly-open and metal CMP steps in RMG processing on planar and 3D architecture devices

Devriendt, KatiaKatiaDevriendtKellens, KristofKristofKellensVeloso, AnabelaAnabelaVelosoAthimulam, RajaRajaAthimulamHoriguchi, NaotoNaotoHoriguchiLeunissen, PeterPeterLeunissen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18841Poly-open and metal CMP steps in RMG processing on planar and 3D architecture devicesProceedings paper