Area-selective grafting of siloxane molecules on low-k dielectric with respect to copper surface

Rezvanov, AskarAskarRezvanovZyulkov, IvanIvanZyulkovGornev, E. S.E. S.Gornevde Marneffe, Jean-FrancoisJean-Francoisde MarneffeArmini, SilviaSilviaArmini2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31656Area-selective grafting of siloxane molecules on low-k dielectric with respect to copper surfaceMeeting abstracthttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf