Zhu, YunpengYunpengZhuJiao, Y.Y.JiaoWang, J.J.WangXie, WeiqiangWeiqiangXieBin, TianTianBinVan Thourhout, DriesDriesVan Thourhout2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27676Ultra-compact silicon nitride grating coupler for microscopy systemProceedings paper