Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG films

Sun, YitingYitingSunLevrau, ElisabethElisabethLevrauZhang, LipingLipingZhangGeypen, JefJefGeypenFranquet, AlexisAlexisFranquetLe, Quoc ToanQuoc ToanLede Marneffe, Jean-FrancoisJean-Francoisde MarneffeBender, HugoHugoBenderStruyf, HerbertHerbertStruyfBaklanov, MikhaïlMikhaïlBaklanovDetavernier, ChristopheChristopheDetavernierDe Feyter, StevenStevenDe FeyterArmini, SilviaSilviaArmini2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24578Stuffing-enabled confinement of self-assembled monolayer used as sealing agent on plasma-exposed 2.0 p-OSG filmsMeeting abstract