Wu, ChenChenWuLi, YunlongYunlongLiCiofi, IvanIvanCiofiKauerauf, ThomasThomasKaueraufBoemmels, JuergenJuergenBoemmelsDe Wolf, IngridIngridDe WolfTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2021-10-232021-10-2320150021-8979https://imec-publications.be/handle/20.500.12860/26188Towards understanding intrinsic degradation and breakdown mechanism of a SiOCH low-k dielectricJournal articlehttp://dx.doi.org/10.1063/1.4907686