Improved surface cleaning by in-situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells

Granata, StefanoStefanoGranataBearda, TwanTwanBeardaDross, FredericFredericDrossGordon, IvanIvanGordonPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20748Improved surface cleaning by in-situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cellsMeeting abstract