High Ge content SiGe thin films: growth, properties and integration

Hikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelDhayalan, Sathish KumarSathish KumarDhayalanWitters, LiesbethLiesbethWittersMertens, HansHansMertensBender, HugoHugoBenderFavia, PaolaPaolaFaviaLoo, RogerRogerLoo2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23936High Ge content SiGe thin films: growth, properties and integrationProceedings paperhttp://ecst.ecsdl.org/content/64/6/831.abstract