AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range

Malinowski, PawelPawelMalinowskiJohn, JoachimJoachimJohnLorenz, AnneAnneLorenzAparicio Alonso, PatriciaPatriciaAparicio AlonsoGermain, MarianneMarianneGermainDerluyn, JoffJoffDerluynCheng, KaiKaiChengBorghs, GustaafGustaafBorghsMertens, RobertRobertMertensDuboz, Jean YvesJean YvesDubozSemond, FabriceFabriceSemondHochedez, J.-F.J.-F.HochedezBenmoussa, A.A.Benmoussa2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14107AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength rangeProceedings paperhttp://dx.doi.org/10.1117/12.780948