Vandervorst, WilfriedWilfriedVandervorstJurczak, GosiaGosiaJurczakEveraert, Jean-LucJean-LucEveraertPawlak, B.J.B.J.PawlakDuffy, RayRayDuffyDel-Agua-Bomiquel, J.I.J.I.Del-Agua-BomiquelPoon, T.T.Poon2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/14707Probing doping conformality in fin shaped field effect transistor structures using resistorsJournal article