Mechanical stress of the electrical performance of polycrystalline-silicon resistors

Nakabayashi, N.N.NakabayashiOhyama, HidenoriHidenoriOhyamaSimoen, EddyEddySimoenIkegami, M.M.IkegamiClaeys, CorCorClaeysKobayashi, K.K.KobayashiYoneoka, M.M.YoneokaMiyahara, K.K.Miyahara2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5509Mechanical stress of the electrical performance of polycrystalline-silicon resistorsJournal article