Is there a limit when the access resistance impact on the extraction of key GAA NS FETs devices parameters can (not) be avoided?

Tahiat, A.A.TahiatCretu, B.B.CretuVeloso, AnabelaAnabelaVelosoSimoen, E.E.Simoen2024-04-112024-02-052024-04-1120230038-1101WOS:001148943100001https://imec-publications.be/handle/20.500.12860/43495Is there a limit when the access resistance impact on the extraction of key GAA NS FETs devices parameters can (not) be avoided?Journal article10.1016/j.sse.2023.108711WOS:001148943100001NOISE