Parylene N as a dielectric material for through silicon vias

Majeed, BivraghBivraghMajeedPham, NgaNgaPhamSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanBeyne, EricEricBeyne2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14102Parylene N as a dielectric material for through silicon viasProceedings paper