In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

Sawada, KenKenSawadaVan der Plas, GeertGeertVan der PlasMori, ShigetakaShigetakaMoriCherman, VladimirVladimirChermanMercha, AbdelkarimAbdelkarimMerchaVerkest, DiederikDiederikVerkestFukuzaki, YuzoYuzoFukuzakiAmmo, HiroakiHiroakiAmmo2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25866In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuitProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7106126