Impact of plasma pre-treatment before SiNx passivation on AlGaN/GaN HFETs electrical traps

Guhel, Y.Y.GuhelBoudart, B.B.BoudartVellas, N.N.VellasGaquiere, C.C.GaquiereDelos, E.E.DelosDucatteau, D.D.DucatteauBougrioua, Z.Z.BougriouaGermain, MarianneMarianneGermain2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10534Impact of plasma pre-treatment before SiNx passivation on AlGaN/GaN HFETs electrical trapsJournal article