Gronheid, RoelRoelGronheidRathsack, BenjaminBenjaminRathsackBernard, SophieSophieBernardVaglio Pret, AlessandroAlessandroVaglio PretNafus, KathleenKathleenNafusHatakeyama, ShinichiShinichiHatakeyama2021-10-172021-10-1720090914-9244https://imec-publications.be/handle/20.500.12860/15403Effect of PAG distribution on ArF and EUV resist performanceJournal article