Photosensitive insulation coating for a copper redistribution layer process

Matsutani, HiroshiHiroshiMatsutaniMitsukura, KazuyukiKazuyukiMitsukuraMakino, TatsuyaTatsuyaMakinoDuval, FabriceFabriceDuvalDetalle, MikaelMikaelDetalleMiller, AndyAndyMillerBeyne, EricEricBeyne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24229Photosensitive insulation coating for a copper redistribution layer processProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7009622