TOF-SIMS artifact in the analysis of ZrO2/SiO2/Si stacks

De Witte, HildeHildeDe WitteConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstGijbels, RenaatRenaatGijbels2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5218TOF-SIMS artifact in the analysis of ZrO2/SiO2/Si stacksOral presentation