Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithography

Zhuang, Y.X.Y.X.ZhuangFrandsen, L.H.L.H.FrandsenHarpoth, A.A.HarpothThorhauge, M.M.ThorhaugeKristensen, M.M.KristensenBorel, P.I.P.I.BorelBogaerts, WimWimBogaertsBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9986Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithographyProceedings paper