Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)

van Spengen, MerlijnMerlijnvan SpengenDe Wolf, IngridIngridDe WolfPuers, BobBobPuersVikhagen, E.E.Vikhagen2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5758Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)Proceedings paper