Calibration of PIXE yields using binary thin films on Si

Meersschaut, JohanJohanMeersschautCarbonel, JacobJacobCarbonelPopovici, Mihaela IoanaMihaela IoanaPopoviciZhao, QiangQiangZhaoVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220140168-583Xhttps://imec-publications.be/handle/20.500.12860/24233Calibration of PIXE yields using binary thin films on SiJournal articlehttp://www.sciencedirect.com/science/article/pii/S0168583X14004820