Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates

De Jaeger, BriceBriceDe JaegerVan Hove, MarleenMarleenVan HoveWellekens, DirkDirkWellekensKang, XuanwuXuanwuKangLiang, HuHuLiangMannaert, GeertGeertMannaertGeens, KarenKarenGeensDecoutere, StefaanStefaanDecoutere2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20543Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substratesProceedings paper