Low temperature pre-epi Treatment: critical parameters to control interface contamination

Hikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooDhayalan, Sathish KumarSathish KumarDhayalanWostyn, KurtKurtWostynRosseel, ErikErikRosseelSimoen, EddyEddySimoenMachkaoutsan, VladimirVladimirMachkaoutsanProfijt, HaraldHaraldProfijtTolle, JohnJohnTolle2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22490Low temperature pre-epi Treatment: critical parameters to control interface contaminationMeeting abstract