Conard, ThierryThierryConardZborowski, CharlotteCharlotteZborowskiVanleenhove, AnjaAnjaVanleenhoveHoflijk, IlseIlseHoflijkVaesen, IngeIngeVaesenvan der Heide, PaulPaulvan der Heide2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36581Buried interface and buried film analysis using lab-scale Haxpes instrumentsOral presentationhttps://www.avssymposium.org/AVS2021/Sessions/Schedule/70697