Ge-based passivation for high permittivity oxide deposition on III-V compounds substrates

Molle, A.A.MolleSpiga, S.S.SpigaLamagna, L.L.LamagnaFanciulli, M.M.FanciulliBrammertz, GuyGuyBrammertzMeuris, MarcMarcMeuris2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15883Ge-based passivation for high permittivity oxide deposition on III-V compounds substratesMeeting abstract