Removal of nano-particles and structural damage in megasonic cleaning of silicon wafers

Vereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsArnauts, SophiaSophiaArnautsKenis, KarineKarineKenisLux, MarcelMarcelLuxVos, RitaRitaVosSnow, JimJimSnowMertens, PaulPaulMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9858Removal of nano-particles and structural damage in megasonic cleaning of silicon wafersOral presentation