Determination of the oxygen content in platelike and octahedral oxygen precipitates in silicon with FT-IR spectroscopy

De Gryse, O.O.De GryseClauws, P.P.ClauwsVanhellemont, JanJanVanhellemontClaeys, CorCorClaeys2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1813Determination of the oxygen content in platelike and octahedral oxygen precipitates in silicon with FT-IR spectroscopyProceedings paper