Stoichiometry and Thickness of Epitaxial SrTiO₃ on Silicon (001): An Investigation of Physical, Optical, and Electrical Properties

Boelen, AndriesAndriesBoelenBaryshnikova, MarinaMarinaBaryshnikovaUlrich, AnjaAnjaUlrichBrahim, KamalKamalBrahimVan de Vondel, JorisJorisVan de VondelHaffner, ChristianChristianHaffnerMerckling, ClementClementMerckling2025-08-012025-08-012025-JUL 21528-7483WOS:001535164700001https://imec-publications.be/handle/20.500.12860/45995Stoichiometry and Thickness of Epitaxial SrTiO₃ on Silicon (001): An Investigation of Physical, Optical, and Electrical PropertiesJournal article10.1021/acs.cgd.5c00103WOS:001535164700001MOLECULAR-BEAM-EPITAXYROOM-TEMPERATURETHIN-FILMSSRFERROELECTRICITYPERMITTIVITYOXIDESFIELD