Pollentier, IvanIvanPollentierNeira, ImanolImanolNeiraGoethals, MiekeMiekeGoethalsGronheid, RoelRoelGronheid2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17819Correlation of EUV optics contamination and the photoresist chemistryProceedings paper