Plan-view specimen preparation of device structures with FIB

Bender, HugoHugoBenderVan Marcke, PatriciaPatriciaVan MarckeRichard, OlivierOlivierRichardFavia, PaolaPaolaFavia2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24985Plan-view specimen preparation of device structures with FIBOral presentation