Improving APT-AFM technology: towards high resolution 3D APT tip shapes

Op de Beeck, JonathanJonathanOp de BeeckFleischmann, ClaudiaClaudiaFleischmannParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorst2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31448Improving APT-AFM technology: towards high resolution 3D APT tip shapesMeeting abstract