Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench

Sardo, StefanoStefanoSardoPalombizio, AntonioAntonioPalombizioRedolfi, AugustoAugustoRedolfiMannarino, ManuelManuelMannarino2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35897Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trenchMeeting abstracthttps://iopscience.iop.org/article/10.1149/MA2020-01221289mtgabs#