Micromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projection

Malyutenko, VolodymyrVolodymyrMalyutenkoMalyutenko, OlegOlegMalyutenkoLeonov, VladimirVladimirLeonovVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-1820090003-6951https://imec-publications.be/handle/20.500.12860/15798Micromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projectionJournal article