Pobedinskas, PauliusPauliusPobedinskasRuttens, BartBartRuttensD'Haen, JanJanD'HaenHaenen, KenKenHaenen2021-10-202021-10-2020120003-6951https://imec-publications.be/handle/20.500.12860/21314Optical phonon lifetimes in sputtered AlN thin filmsJournal article