Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloHarukawa, RyotaRyotaHarukawaSuri, MayurMayurSuriDurant, StephaneStephaneDurantCross, AndrewAndrewCrossNagaswami, VenkatVenkatNagaswamiVan Den Heuvel, DieterDieterVan Den HeuvelGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22997Defect source analysis of directed self-assembly process (DSA of DSA)Proceedings paper