Le, Quoc ToanQuoc ToanLePatz, M.M.PatzStruyf, HerbertHerbertStruyfBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9185Interaction of a variety of ashing plasma with MSQ low-k dielectricMeeting abstract