Radiation damages in STI diodes after high temperature electron-irradiation

Ohyama, H.H.OhyamaHayama, K.K.HayamaTakakura, K.K.TakakuraMiura, T.T.MiuraSimoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiTakami, Y.Y.TakamiClaeys, CorCorClaeys2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6654Radiation damages in STI diodes after high temperature electron-irradiationOral presentation