Yildirim, OktayOktayYildirimvan Haren, RichardRichardvan HarenMouraille, OrionOrionMouraillevan Dijk, LeonLeonvan DijkHermans, JanJanHermansKumar, KaushikKaushikKumarFeurprier, YannickYannickFeurprier2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36382Etch tool pressure optimization enabling wafer edge overlay control.Oral presentation