A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling

Goux, LudovicLudovicGouxRusso, G.G.RussoMenou, N.N.MenouLisoni, JuditJuditLisoniSchwitters, M.M.SchwittersParaschiv, VasileVasileParaschivMaes, DavidDavidMaesArtoni, C.C.ArtoniCorallo, G.G.CoralloHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersZambrano, R.R.ZambranoMuller, Ch.Ch.Muller2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10520A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scalingJournal article